This is a new course which will introduce some of the modern semiconductor technology in both electronics and optical-electronics area. The content of the course can be separated into two main categories: (1) Advanced nano-scale semiconductor technology and (2) Optical-electronic semiconductor technology. The students who want to take this course need to have basic knowledge in semiconductor process technology.



一.內容



Advanced nano-scale semiconductor technology



1. Advanced optical lithography and none-optical lithography: E-beam lithography, nano-imprint, and self-assembly process

2. Advanced CMOS: High-k gate oxide and metal gate

3. Advanced interconnect: Low-k materials and Cu process

4. Strained silicon in CMOS technology

5. SOI technology

6. SiGe and its application

7. Atomic-Scale Thin Films Deposition Techniques: Atomic Layer Chemical Vapor Deposition (ALCVD)

8. Characterization Techniques for Nano-science





Opto-electronic semiconductor technology



1. TFT-LCD technology

2. Conventional LED

3. Short-wavelength and white LED: GaN based LED

4. Organic LED

5. Digital camera: CCD vs. CMOS

6. Solar cell

7. Atomic-Scale Thin Films Deposition Techniques: Molecular Beam Epitaxy (MBE)